Real-time luminescence spectroscopic analysis system CrevPEM
Industry first! Real-time analysis of plasma background! Also applicable as an endpoint monitor. Amazingly low-priced OES software.
Achieved through joint development with Osaka University! This is the industry's first system that analyzes background using continuous spectra of plasma in real-time. As a result, it is now possible to monitor molecular fluctuations in real-time and estimate electron temperature faster than with probe methods. Target molecules can be freely set, allowing applications not only in plasma but also across a wide range of fields. It also includes functionality as an endpoint monitor, making it usable in manufacturing environments. The spectrometer and software set can be introduced at a very affordable price.
- Company：クレブ
- Price：Other
